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Wafer-Search Operation Procedure and Troubleshooting

11: Reading out of wafer-search results

After executing wafer-search, read out the results of wafer-search.
Read out the results of wafer-search via serial communication.
Input the following commands for configuration:
This operation reads out the results of wafer-search.
The response from the controller is as follows:
Response


Return value and Search results
Read out the data equivalent to the number of cassette slots (“3: Setting of the number of cassette slots (WFC setting)”) and the following status is displayed:
0: No wafers detected
1: Wafers detected
W: Thickness error
E: Cross-slotted
*The contents of status display varies depending on specifications. Please refer to the instruction manual.
For example) To output “robot $1, 25 slots of the cassette with wafers placed in all slots, neither cross-slotted nor thickness errors", the following status will be displayed.
>$11,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1


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